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ЖУРНАЛЫ // Наносистемы: физика, химия, математика // Архив

Наносистемы: физика, химия, математика, 2017, том 8, выпуск 1, страницы 75–78 (Mi nano11)

PHYSICS

Simulation of DIBL effect in junctionless SOI MOSFETs with extended gate

A. E. Atamuratova, M. Khalilloeva, A. Abdikarimova, Z. A. Atamuratovaa, M. Kittlerb, R. Granznerb, F. Schwierzb

a Urganch State University, Kh. Olimjan, 14, Urganch, 220100, Uzbekistan
b Technical University of Ilmenau, Ehrenbergstrasse, 29, 98693 Ilmenau, Germany

Аннотация: Short channel effects such as DIBL are compared for trigate SOI Junctionless MOSFET with extended and non-extended lateral part of the gate. A trigate SOI JLMOSFET with gate length L$_{\operatorname{gate}}$, a silicon body width W$_{\operatorname{tin}}$ and thickness of 10 nm are simulated. In order to calculate the DIBL, the transfer characteristics of JLMOSFETs was simulated at a donor concentration of $5\cdot10^{19}$cm$^{-3}$ in the silicon body. The equivalent oxide thicknesses of the HfO$_2$ gate insulator used in simulation was 0.55 nm. Simulation result showed the DIBL for the trigate JLMOSFET depended on the length of the lateral part of the gate L$_{\operatorname{ext}}$. DIBL is high for devices with gates having extended lateral parts. This is a result of parasitic source (drain)-gate capacitance coupling which is higher for longer L$_{\operatorname{ext}}$.

Ключевые слова: Junctionless MOSFET, DIBL, parasitic capacitance.

PACS: 85.30.Tv

Поступила в редакцию: 08.07.2016
Исправленный вариант: 30.08.2016

Язык публикации: английский

DOI: 10.17586/2220-8054-2017-8-1-75-78



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