Аннотация:
Recently, the accelerometer has taken on a vital role in health monitoring system. The monitoring of patients disease has been aided by the use of different diagnostics. These devices exist at the macro level and also in micro level for condition monitoring. Capacitive Micro-accelerometer is a wearable sensor for monitoring of scoliosis disease in patients by analyzing their sitting posture, asymmetrical balance of patients. A new approach for accelerometer, using an $L$-shaped cantilever parallel plate MEMS accelerometer design is proposed. This micro accelerometer is designed using INTELLISUITE 8.6. Static analysis is done using Thermo Electro Mechanical module to examine the performance. Proposed design is compared with the existing design. In the future, this can also be applied in NANO level applications with respect to its design and fabrication.