A. B. Danilin, M. N. Kuznetsov, A. A. Maiorov, V. A. Putintsev, I. B. Yadykin, “Adaptive Control of Thermal Evaporation in Vacuo”, Avtomat. i Telemekh., 1985, Issue 4,Pages <nobr>81

Adaptive Systems

Adaptive Control of Thermal Evaporation in Vacuo

A. B. Danilin, M. N. Kuznetsov, A. A. Maiorov, V. A. Putintsev, I. B. Yadykin

Moscow

Abstract: A microprocessor-controlled industrial process of thermal thin.film sedimantationc and control algorithm are described.

UDC: 62-506, 539.234

Received: 12.04.1984