Abstract:
A series of thin-film carbon samples on glass was obtained by scanning electron-beam sputtering of pyrographite (target) in an oil-free vacuum (10${}^{-5}$ mm Hg). The optical and electrical properties of the series of samples are measured depending on the thickness of the films. On the basis of the obtained experimental dependences of the optical and electrical properties on the thickness of film samples, two dominant stages of films growth were revealed: layered up to 9 layers of graphene and polycrystalline films with a flake structure with further condensation.