Abstract:
The way of calculation of multiple coatings with the given optical parameters is developed, model operation of a high-reflective coatings and their creation on vacuum processing equipment is carried out by method of ion-plasma evaporation. Feature of this way is use of model function of an electromagnetic wave in which absorption depends only on coordinate, normal to a surface. Such approach corresponds to a situation when cross sectional dimensions of a bunch there are much more than thickness of coverings, and allows to consider the fact that amplitude of an electromagnetic wave is identical in various points on equal removal from a surface. On the basis of the offered way of calculation the method of non-contact control of thickness of thin films by comparison of the actual and estimated optical performances of separate layers of coatings is offered. Comparison of the experimental transmittances of multilayer mirrors with data of calculated model is carried out.