A program for calculating the projective range and straggling of ions in a solidusing the approximation of V.V. Yudin

Ion implantation is the basis of many technological processes in electronics and microelectronics. The main quantities characterizing the penetration of ions into a solid are as follows; the length of the path of the ion until it stops completely, the average value of the projection of the total path on the direction of motion $\bar R_p$, and the average normal deviation of the projection of the path $\Delta\bar R_p$. To calculate these values, computer programs SRIM, TRIM, and DYNE have been created, which require installation on a personal computer and occupy a large amount of hard disk space, which is not always justified in engineering practice. This paper describes an algorithm for a simple, installation-free program for calculating $\bar R_p$ and $\Delta\bar R_p$. The program algorithm is based on the Lindhard-Scharff-Schiott theory.