Influence of a synthesis method of hologram projectors and phase distribution in the object plane on the quality of the reconstructed image

The paper presents results of research into the influence of the hologram synthesis method, as well as the phase distribution in the object plane used to describe the object wave, on the quality of the reconstructed image. Using numerical experiments, we synthesized hologram-projectors of two-dimensional amplitude binary transparencies, which present photomasks intended for the implementation of a holographic photolithography method. Two methods of hologram synthesis were considered: a method based on the Huygens principle and a method of look-up tables. It is established that the modified method of look-up tables allows generating holograms characterized by a higher quality of the reconstructed image. The effect of phase mask insertion in the wave illuminating the object on the quality of the reconstructed image is also demonstrated.