RUS
ENG
Full version
JOURNALS
// Doklady Akademii Nauk
// Archive
Dokl. Akad. Nauk SSSR,
1969
Volume 189,
Number 2,
Pages
302–304
(Mi dan35026)
PHYSICS
Target sputtering as dependent on the incidence angle of the bombarding particles
O. B. Firsov
UDC:
537-334.8
Presented:
M. A. Leontovich
Received: 20.03.1969
Fulltext:
PDF file (462 kB)
©
Steklov Math. Inst. of RAS
, 2024
Fulltext:
PDF file (462 kB)