CRYSTALLOGRAPHY

Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen

P. V. Pavlov

Gorky Research Institute of Physics and Technology, Gorky State University

UDC: 539.1.043+539.213+539.27

Presented: N. V. Belov
Received: 06.03.1978