M. F. Galyautdinov, Yu. K. Danileiko, M. M. Zaripov, A. A. Manenkov, A. V. Sidorin, I. B. Khaibullin, E. I. Shtyrkov, “Annealing of implanted layers of silicon by the pulsed <nobr>$\mathrm{CO}_2$</nobr>-laser radiation”, Dokl. Akad. Nauk SSSR, 1981, Volume 257, Number 5,Pages <nobr>1110

JOURNALS // Doklady Akademii Nauk // Archive

Dokl. Akad. Nauk SSSR, 1981 Volume 257, Number 5, Pages 1110–1113 (Mi dan44389)

PHYSICS

Annealing of implanted layers of silicon by the pulsed $\mathrm{CO}_2$-laser radiation

M. F. Galyautdinov, Yu. K. Danileiko, M. M. Zaripov, A. A. Manenkov, A. V. Sidorin, I. B. Khaibullin, E. I. Shtyrkov

P. N. Lebedev Physical Institute, the USSR Academy of Sciences, Moscow

UDC: 621.315.592

Presented: A. M. Prokhorov
Received: 10.11.1980