PHYSICS

Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy

Yu. V. Gulyaev, M. A. Kulakov, A. I. Morosov, E. I. Rau

Institute of Radio Engineering and Electronics, Academy of Sciences of the USSR, Moscow

UDC: 621.385.833:534.6.88

Received: 28.04.1987