Abstract:
The redistribution of $^{28}$Si, $^{29}$Si, and $^{30}$Si isotopes in subsurface layers of Si: B single crystals after their plastic deformation has been revealed. It has been found that the distribution profile of $^{28}$Si and $^{29}$Si isotopes becomes smoother after deformation, whereas the $^{30}$Si isotope distribution remains unchanged. A change in the subsurface profile of the $^{29}$SiO oxide is observed, which indicates the migration of the $^{29}$Si isotope in the composition of oxygen complexes during plastic deformation.