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JOURNALS // Fizika Tverdogo Tela // Archive

Fizika Tverdogo Tela, 2024 Volume 66, Issue 2, Pages 280–288 (Mi ftt10241)

Surface physics, thin films

The electrical resistance of laser-induced graphene synthesized by a continuous-wave CO$_2$-laser

K. G. Mikheev, R. G. Zonov, N. V. Chuchkalov, G. M. Mikheev

Udmurt Federal Research Center, Ural Branch Russian Academy of Sciences, Izhevsk, Russia

Abstract: Laser-Induced Graphene (LIG) is a promising new material for widespread applications in electronics and medicine. This study presents experimental results on measuring its specific conductivity $(\sigma)$, sheet resistance $(R_s)$, as well as contact resistance $(R_c)$ and specific contact resistance $(\rho_c)$ of a copper electrode with the LIG film structure synthesized on the surface of a polyimide film using the method of its near-surface layer pyrolysis through line-by-line scanning of a focused beam of $cw$ carbon dioxide laser. It is established that the synthesized LIG film structure exhibits anisotropy in electrical resistance, attributed to the line-by-line scanning. It is demonstrated that $\sigma$, $R_s$, $R_c$, and $\rho_c$ significantly depend on the fluence $(F)$ of the incident laser radiation. Measured values of $\sigma$, $R_s$, $R_c$, and $\rho_c$ varied in the ranges of 7.7 $\div$ 10 S/cm, 26 $\div$ 49 $\Omega/sq$, and 9 $\div$ 43 $\Omega$ $\cdot$ mm$^2$, respectively, with an increase in $F$ from 31 to 137 J/cm$^2$.

Keywords: sheet resistance, specific conductivity, contact resistance, specific contact resistance, electrical anisotropy.

Received: 15.01.2024
Revised: 15.01.2024
Accepted: 17.01.2024

DOI: 10.61011/FTT.2024.02.57252.5



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© Steklov Math. Inst. of RAS, 2025