Nanocrystalline zirconia for functional applications obtained by deposition from low-pressure arc discharge plasma

The controlled vacuum-arc synthesis of nanoparticles and nanocrystalline layers based on zirconium dioxide (ZrO$_2$) is considered, which allows regulating the percentage ratio of the monoclinic and tetragonal phases. The formation of the tetragonal phase is associated with the formation of a large number of oxygen vacancies formed due to high-speed quenching of nanoparticles. The samples were characterized using X-ray phase analysis. The electrical properties of the samples were studied using impedance spectroscopy and measuring the current-voltage characteristics. The dependence of the permittivity and conductivity in the direct current mode on the phase composition was established. The coexistence of the $m$- and $t$-ZrO$_2$ phases provides oxygen deficiency in the sample volume. This contributes to the formation of two reversible resistance states – the effect of resistive switching.