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JOURNALS // Fizika Tverdogo Tela // Archive

Fizika Tverdogo Tela, 2023 Volume 65, Issue 1, Pages 43–48 (Mi ftt10561)

Semiconductors

Detection and study of 60$^\circ$-rotation domains in $\alpha$-Ga$_2$O$_3$ using transmission electron microscopy

A. V. Myasoedova, I. S. Pavlovb, A. I. Pechnikovac, V. I. Nikolaevac

a Ioffe Institute, St. Petersburg
b Institute of Cristallography Russian Academy of Sciences, Moscow
c Perfect Crystals LLC, Saint-Petersburg

Abstract: The conditions have been established for detection and recognition of rotation domains in $\alpha$-Ga$_2$O$_3$ /$\alpha$-Al$_2$O$_3$ thin films in the presence of other polymorphs. The domains are visualized by high-resolution transmission electron microscopy. Their structural characteristics are determined by preparing cross-sectional and plan-view specimens, choosing the correct diffraction conditions and proper imaging modes. As a result, the dimensions, the spatial distribution, the volume fraction and area fraction of the inclusions of domains have been determined.

Keywords: structural defects, rotational domains, transmission electron microscopy, gallium oxide.

Received: 23.08.2022
Revised: 23.08.2022
Accepted: 06.09.2022

DOI: 10.21883/FTT.2023.01.53921.463



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© Steklov Math. Inst. of RAS, 2025