Abstract:
The conditions have been established for detection and recognition of rotation domains in $\alpha$-Ga$_2$O$_3$ /$\alpha$-Al$_2$O$_3$ thin films in the presence of other polymorphs. The domains are visualized by high-resolution transmission electron microscopy. Their structural characteristics are determined by preparing cross-sectional and plan-view specimens, choosing the correct diffraction conditions and proper imaging modes. As a result, the dimensions, the spatial distribution, the volume fraction and area fraction of the inclusions of domains have been determined.
Keywords:structural defects, rotational domains, transmission electron microscopy, gallium oxide.