Yu. V. Kislinskii, I. E. Moscal, A. M. Petrzhik, A. V. Shadrin, G. A. Ovsyannikov, “Synthesis of strontium iridates thin films by cathode sputtering: comparison with traditional laser ablation technology”, Fizika Tverdogo Tela, 2023, Volume 65, Issue 7,Pages <nobr>1089

XXVII International Symposium "Nanophysics and Nanoelectronics", Nizhny Novgorod, March 13-16, 2023
Metals

Synthesis of strontium iridates thin films by cathode sputtering: comparison with traditional laser ablation technology

Yu. V. Kislinskii^a, I. E. Moscal^a, A. M. Petrzhik^a, A. V. Shadrin^ab, G. A. Ovsyannikov^a

^a Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, Moscow, Russia
^b Moscow Institute of Physics and Technology (National Research University), Dolgoprudny, Moscow Region

Abstract: The technology of obtaining structured thin films of strontium iridates of the compositions SrIrO$_3$ and Sr$_2$IrO$_4$ by direct current cathode sputtering is presented. Both compositions were synthesized using the stoichiometric target Sr$_2$IrO$_4$, only the technological parameters varied. The composition of the resulting films was determined by the operating pressure and temperature. The electrophysical and structural properties of the obtained dielectric Sr$_2$IrO$_4$ and “metallic” SrIrO$_3$ films are discussed. The dielectric series is compared with Sr$_2$IrO$_4$ films obtained by laser ablation previously.

Keywords: strontium iridate, cathode sputtering, metals, disordered structures, hopping conductivity, activation energy of charge carriers.

Received: 17.04.2023
Revised: 17.04.2023
Accepted: 11.05.2023

DOI: 10.21883/FTT.2023.07.55827.36H