Processing of signals obtained under conditions of modulation of the operating temperature of a conductometric sensor based on thin films PdO

The results of resistive tests of thin (30 nm) PdO sensor films in air with different ozone concentrations are presented. The mode of harmonic temperature modulation of sensors is used in the work. The specimens show high sensitivity to ozone concentrations in $ppb$-range. Consideration of electrical conductivity $\sigma$, mS instead of resistivity $R$, $k\Omega$ revealed good reproducibility of absolute increase signals $\Delta\sigma$. This made it possible to extract the contribution of the analyte to the raw conductometric response by simple subtraction, and to build a multivariate calibration based on the features of such an extracted response and its Fourier image.