Growth of vertically aligned multi-wall carbon nanotubes on SiO$_2$/Si structures modified by ion irradiation

Morphological parameters of layers of vertically aligned multi-walled carbon nanotubes at various stages of synthesis have been studied. It is shown that as a result of ion processing of the growth substrate, a more intensive and homogeneous growth of multi-walled carbon nanotubes occurs. Modification of the growth substrate increases the number of places where the catalyst particles are fixed on the surface, which leads to the formation of a more homogeneous layer of nanotubes on the substrate. The analysis of the data obtained by the method of energy dispersion analysis showed a correlation of the effect of increasing the density of carbon nanotubes with the dose of ion surface treatment. Pretreatment of the growth substrate surface by ion irradiation helps to reduce the inhomogeneity of the nanotubes layer.