Fabrication of aperture cantilevers for scanning near-field optical microscopy using focused ion beam induced deposition method

The paper presents a new technique for the formation of probe tips for scanning near-field optical microscopy using the method of local ion-induced carbon deposition. Experimental studies on tip formation have been carried out, with the establishment of optimal technological parameters to ensure high accuracy and repeatability of the process results. The parameters of the probe were investigated in atomic force microscopy mode, and the transmission of optical radiation through the probe aperture was also studied.