Features of epitaxial growth of YBCO in the windows of the preliminary topology mask

This work is devoted to the study of epitaxial YBCO films obtained by laser sputtering during deposition of YBCO into the windows of the special preliminary topology mask. The morphology of the surface of the obtained structures was studied by electron microscopy, the electrical characteristics of superconducting bridges were measured: the critical temperature and the critical current density. The possibility of forming YBCO structures of a given topology with defect-free regions of micron sizes while maintaining high electrophysical parameters of the superconductor is shown. This opens up the possibility of reproducibly forming submicron-scale elements in the created defect-free areas using ion etching or ion implantation.