RUS  ENG
Full version
JOURNALS // Fizika Tverdogo Tela // Archive

Fizika Tverdogo Tela, 2025 Volume 67, Issue 2, Pages 350–355 (Mi ftt11342)

Low dimensional systems

Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes

S. V. Bulyarskii, M. S. Molodenskii, P. E. L'vov, A. A. Pavlov, Yu. V. Anufriev, Yu. P. Shaman, G. G. Gusarov, K. A. Modestov, A. V. Sysa, A. R. Shevchenko

Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences

Abstract: The paper studies the effect of hydrogen flow on vapor-phase synthesis of carbon nanotubes in gas discharge plasma. Increasing the hydrogen flow in the reactor reduces the plasma temperature and increases the number of defects in the synthesized nanotubes. Analysis of the thermodynamics of synthesis shows that increasing the hydrogen concentration reduces the activity of the catalyst and reduces the amount of carbon supplied to the growing nanotube, which leads to an increase in the number of defects.

Keywords: carbon nanotubes, synthesis, defects.

Received: 10.01.2025
Revised: 10.01.2025
Accepted: 11.01.2025

DOI: 10.61011/FTT.2025.02.59991.8-25



Bibliographic databases:


© Steklov Math. Inst. of RAS, 2025