RUS
ENG
Full version
JOURNALS
// Fizika Tverdogo Tela
// Archive
Fizika Tverdogo Tela,
2015
Volume 57,
Issue 7,
Pages
1315–1319
(Mi ftt11554)
Semiconductors
Deposition of
$\beta$
-Ga
$_2$
O
$_3$
layers by sublimation on sapphire substrates of different orientations
V. N. Maslov
ab
,
V. I. Nikolaev
abc
,
V. M. Krymov
ab
,
V. E. Bugrov
b
,
A. E. Romanov
ab
a
Ioffe Institute, St. Petersburg
b
St. Petersburg National Research University of Information Technologies, Mechanics and Optics
c
Perfect Crystals LLC, Saint-Petersburg
Abstract:
Layers of
$\beta$
-Ga
$_2$
O
$_3$
have been grown by sublimation on sapphire substrates of different orientations. The main features of the crystal growth, morphology of layers, and their composition have been studied.
Received:
09.12.2014
Accepted:
03.02.2015
Fulltext:
PDF file (1225 kB)
English version:
Physics of the Solid State, 2015,
57
:7,
1342–1346
Bibliographic databases:
©
Steklov Math. Inst. of RAS
, 2025