RUS  ENG
Full version
JOURNALS // Fizika Tverdogo Tela // Archive

Fizika Tverdogo Tela, 2015 Volume 57, Issue 7, Pages 1315–1319 (Mi ftt11554)

Semiconductors

Deposition of $\beta$-Ga$_2$O$_3$ layers by sublimation on sapphire substrates of different orientations

V. N. Maslovab, V. I. Nikolaevabc, V. M. Krymovab, V. E. Bugrovb, A. E. Romanovab

a Ioffe Institute, St. Petersburg
b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
c Perfect Crystals LLC, Saint-Petersburg

Abstract: Layers of $\beta$-Ga$_2$O$_3$ have been grown by sublimation on sapphire substrates of different orientations. The main features of the crystal growth, morphology of layers, and their composition have been studied.

Received: 09.12.2014
Accepted: 03.02.2015


 English version:
Physics of the Solid State, 2015, 57:7, 1342–1346

Bibliographic databases:


© Steklov Math. Inst. of RAS, 2025