Abstract:
This paper presents the results of the investigation of $c$-Si/[Si/Mo]$n$/Si multilayer nanoperiodic structures by X-ray absorption near-edge structure (XANES) spectroscopy using synchrotron radiation. Changes in the fine structure of XANES Mo $L_{2,3}$ spectra confirm the formation of the silicide phase on heterophase interfaces Si/Mo/Si due to the solid-phase interactions between silicon and molybdenum layers.