K. A. Vorotilov, O. M. Zhigalina, V. A. Vasil’ev, A. S. Sigov, “Specific features of the formation of the crystal structure of lead zirconate titanate in the Si–SiO$_2$–Ti(TiO$_2$)–Pt–Pb(Zr$_x$Ti$_{1-x}$)O$_3$ systems”, Fizika Tverdogo Tela, 2009, Volume 51, Issue 7,Pages 1268

This article is cited in 15 papers

Proceeding of the XVIII All-Russia Conference on Physics of Ferroelectrics (VKS-XVIII) (St. Petersburg, Russia, June 9-14, 2008)

Specific features of the formation of the crystal structure of lead zirconate titanate in the Si–SiO$_2$–Ti(TiO$_2$)–Pt–Pb(Zr$_x$Ti$_{1-x}$)O$_3$ systems

K. A. Vorotilov^a, O. M. Zhigalina^b, V. A. Vasil’ev^a, A. S. Sigov^a

^a Moscow State Institute of Radioengineering, Electronics, and Automation (Technical University), Moscow, 119454, Russia
^b Institute of Cristallography Russian Academy of Sciences, Moscow

Abstract: The influence of the bottom electrode structure on the crystal structure and electrophysical properties of lead zirconate titanate thin films formed by chemical solution deposition is investigated. The role played by the processes of diffusion and oxidation of titanium, which result in a partial misorientation of columnar grains of the perovskite structure of the films, is elucidated. It is shown that the preliminary oxidation of titanium leads to an increase in the thermal stability of the metallization system. The influence of the interfaces in the Pt layer on the process of heterogeneous nucleation of perovskite grains is revealed.