Laser annealing of silica glass with ion-synthesized copper nanoparticles

The action of KrF excimer laser radiation on the composite material consisting of the silica glass with copper nanoparticles is investigated as a function of the number of nanosecond laser pulses. Metal nanoparticles are synthesized by ion implantation. It is established using optical reflectance measurements of composite layers that, at the initial stage, the irradiation leads to the fragmentation of the largest nanoparticles. Then, after irradiation by several pulses, the particles become larger due to the heating of the glass. The laser treatment for a longer time (several tens and hundreds of pulses) results in the dissociation of nanoparticles into small clusters and individual atoms. The mechanisms responsible for the modification of the composite material under high-power laser radiation are discussed.