Microdefect formation at silicon single crystal growth

È. G. Sheikhet, È. S. Fal'kevich, K. N. Neimark, I. F. Chervonyi, V. A. Shershel'

Zaporozhye Industrial Institute

UDC: 621.315.592

Received: 14.02.1983
Revised: 22.08.1983

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