È. E. Violin, K. D. Demakov, A. A. Kal'nin, F. Noibert, E. N. Potapov, Yu. M. Tairov, “<nobr>$\mathrm{SiC}$</nobr> layer structure reduction after ion implantation”, Fizika Tverdogo Tela, 1984, Volume 26, Issue 5,Pages <nobr>1575

Short Notes

$\mathrm{SiC}$ layer structure reduction after ion implantation

È. E. Violin, K. D. Demakov, A. A. Kal'nin, F. Noibert, E. N. Potapov, Yu. M. Tairov

Leningrad State Electrotechnical University

UDC: 541.7:546.281'261

Received: 16.02.1984