K. K. Burdl', P. V. Varankin, V. N. Makarov, A. V. Suvorov, N. G. Chechenin, “Structural and compositional rearrangement in <nobr>$\mathrm{SiC}$</nobr> initiated by the ion implantation of gallium and high temperature annealing”, Fizika Tverdogo Tela, 1988, Volume 30, Issue 2,Pages <nobr>629

Short Notes

Structural and compositional rearrangement in $\mathrm{SiC}$ initiated by the ion implantation of gallium and high temperature annealing

K. K. Burdl', P. V. Varankin, V. N. Makarov, A. V. Suvorov, N. G. Chechenin

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

UDC: 621.315.592;546.28'26:039.553

Received: 29.09.1987