Short-time thermal annealing of $\mathrm{Ga}^{+}$-implanted $\mathrm{SiC}$

K. K. Burdl', A. V. Suvorov, N. G. Chechenin

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

UDC: 621.315.592:546.28'26:039.553

Received: 01.11.1989

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