Nonlinear diffusion of the doping impurity and decorat-ion of the vacancy component of near-surface microdefect clusters in silison

A. E. Alekseev, O. I. Gerasimov, A. P. Fedchuk

I. I. Mechnikov Odessa State University

UDC: 539.219.3:546.28—386:548.4

Received: 20.02.1991