Short Notes

Defect interaction in the phosphorus diffusion in silicon

V. A. Panteleev, M. I. Vasilevskii, G. M. Golemshtok, V. I. Okulich

Gor'kii Research Institute of Physics and Technology

UDC: 539.219.3

Received: 12.02.1986
Revised: 21.04.1986

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