Transport and morphological characteristics of thin YBa$_{2}$Cu$_{3}$O$_{7-x}$ films obtained by pulsed laser deposition with velocity filtration of the laser erosion plume

The regimes of pulsed laser deposition with high-speed filtration of an erosion torch with a frequency of 4–33 Hz at different deposition times on SrTiO$_3$(100) substrates at 730–750$^\circ$C and the velocity of filtered particles were used to change the characteristics of the $R(T)$ dependence of YBa$_{2}$Cu$_{3}$O$_{7-x}$ films with a thickness of 150–200 nm. The deposition at the filtration rates of the laser torch $\sim$ 30 Hz formed a nonequilibrium structure with a resistance at room temperature 7 times higher than in the films obtained without filtration, which suggested the absence of easy transport paths for holes in the ab plane. The width of the superconducting transition $\Delta T$ was 2.5–2.9 K, and $T(R=0)$ = 85.8 K, oxygen index $y$ = 6.85, which corresponded to the characteristics of good films of this thickness. Surface studies in SEM allowed us to detect the rearrangement of the crystal structure during deposition and discuss its effect on the transport characteristics of the films.