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Fizika Tverdogo Tela, 2021 Volume 63, Issue 8, Pages 1166–1171 (Mi ftt8079)

This article is cited in 1 paper

Surface physics, thin films

Electronic structure of thermally oxidized tungsten

P. A. Dementeva, E. V. Dementevāa, M. N. Lapushkina, D. A. Smirnovb, S. N. Timoshnevc

a Ioffe Institute, St. Petersburg, St. Petersburg, Russia
b Institut für Festkörper- und Materialphysik, Technische Universität Dresden, Dresden, Germany
c Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg, Russia

Abstract: The electronic structure of a pure tungsten surface oxidized at an oxygen pressure of 1 Torr and a temperature of 1000 K has been in situ studied by photoelectron spectroscopy in ultrahigh vacuum. Photoemission spectra from the valence band and O 1$s$, O 2$s$, and W 4$f$ core levels at synchrotron excitation in the photon energy range of 80–600 eV have been analyzed. A semiconductor tungsten oxide film is found to form, which contains different oxides of tungsten with the oxidation state from 6+ to 4+. Oxides of tungsten with the oxidation state of 6+ are mainly formed on the surface; their fraction gradually decreases while moving away from the surface, while the amount of oxides of tungsten with the oxidation state of 4+ increases.

Keywords: tungsten oxidation, photoelectron spectroscopy.

Received: 25.03.2021
Revised: 30.03.2021
Accepted: 30.03.2021

DOI: 10.21883/FTT.2021.08.51173.065


 English version:
Physics of the Solid State, 2021, 63, 1153–1158

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© Steklov Math. Inst. of RAS, 2025