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Fizika Tverdogo Tela, 2021 Volume 63, Issue 8, Pages 1166–1171 (Mi ftt8079)

Surface physics, thin films

Electronic structure of thermally oxidized tungsten

P. A. Dementeva, E. V. Dementevāa, M. N. Lapushkina, D. A. Smirnovb, S. N. Timoshnevc

a Ioffe Institute, St. Petersburg, St. Petersburg, Russia
b Institut für Festkörper- und Materialphysik, Technische Universität Dresden, Dresden, Germany
c Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg, Russia

Abstract: The electronic structure of a pure tungsten surface oxidized at an oxygen pressure of 1 Torr and a temperature of 1000 K has been in situ studied by photoelectron spectroscopy in ultrahigh vacuum. Photoemission spectra from the valence band and O 1$s$, O 2$s$, and W 4$f$ core levels at synchrotron excitation in the photon energy range of 80–600 eV have been analyzed. A semiconductor tungsten oxide film is found to form, which contains different oxides of tungsten with the oxidation state from 6+ to 4+. Oxides of tungsten with the oxidation state of 6+ are mainly formed on the surface; their fraction gradually decreases while moving away from the surface, while the amount of oxides of tungsten with the oxidation state of 4+ increases.

Keywords: tungsten oxidation, photoelectron spectroscopy.

Received: 25.03.2021
Revised: 30.03.2021
Accepted: 30.03.2021

DOI: 10.21883/FTT.2021.08.51173.065


 English version:
Physics of the Solid State, 2021, 63, 1153–1158

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© Steklov Math. Inst. of RAS, 2024