Two-stage growth of La$_{0.7}$Sr$_{0.3}$MnO$_{3}$ clusters in magnetron plasma under modulation of particle flow by ion-acoustic wave and its deposition on glass

The films with amorphous structure obtained by magnetron sputtering of La$_{0.7}$Sr$_{0.3}$MnO$_{3}$ target were investigated, which made it possible to study the kinetics of clusterization of magnetron plasma during the movement of a flow of interacting particles with the formation at first of local atomic configurations of the pre-cluster level (the first stage of clusterization) and subsequent deposition of the flow on an extended glass substrate (the second stage of the formation of multi-scale clusters). It is shown that the non-monotony in the change of atomic order and properties of the samples with distance from the target is related to the presence of heterovalent manganese ions in the flow and their spatial modulation by an ion-acoustic wave. It was found that the Mn$^{3+}$ and Mn$^{4+}$ ions are contained in the fragments of the planes (13$\bar1$)-R; (203)-R; (212)-O; (003)-O belonging to the different-scale clusters.