I. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, D. A. Kiselev, V. V. Osipov, V. P. Pronin, “Surface morphology, microstructure, and piezoelectric response of perovskite islands in lead zirconate titanate thin films”, Fizika Tverdogo Tela, 2019, Volume 61, Issue 12,Pages <nobr>2369

This article is cited in 2 papers

International Conference ''Mechanisms and Nonlinear Problems of Nucleation, Growth of Crystals and Thin Films'' dedicated to the memory of the outstanding theoretical physicist Professor V.V. Slezov (Proceedings) St. Petersburg, July 1-5, 2019
Ferroelectricity

Surface morphology, microstructure, and piezoelectric response of perovskite islands in lead zirconate titanate thin films

I. P. Pronin^ab, E. Yu. Kaptelov^ab, S. V. Senkevich^ab, D. A. Kiselev^bc, V. V. Osipov^a, V. P. Pronin^b

^a Ioffe Institute, St. Petersburg
^b Herzen State Pedagogical University of Russia, St. Petersburg
^c National University of Science and Technology «MISIS», Moscow

Abstract: The features of the microstructure and piezoelectric response of perovskite islands in the matrix of the pyrochloric phase in thin lead zirconate titanate films formed by the method of radio-frequency magnetron sputtering are investigated. The radial heterogeneity of the surface morphology of the islands and the piezoelectric response is revealed. The role of two-dimensional mechanical stresses acting on a thin film from the side of the silicon substrate is discussed.

Keywords: radio frequency magnetron sputtering, thin films of lead zirconate titanate, perovskite islands, power microscopy of the piezoelectric response.

Received: 16.07.2019
Revised: 16.07.2019
Accepted: 25.07.2019

DOI: 10.21883/FTT.2019.12.48556.13ks