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JOURNALS // Fizika Tverdogo Tela // Archive

Fizika Tverdogo Tela, 2019 Volume 61, Issue 10, Pages 1916–1925 (Mi ftt8676)

This article is cited in 6 papers

Phase transitions

Simulation of wetting phase transitions in thin films

P. E. L'vovab, V. V. Svetukhinc, S. V. Bulyarskiib, A. A. Pavlovb

a Ulyanovsk State University
b Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, Moscow, Russia
c Scientific and Production Company Technological Center, Zelenograd, Moscow, Russia

Abstract: Based on the hydrodynamic model, the kinetics of wetting phase transitions in nanoscale liquid films on the substrate surface is analyzed. In the range of metastable states, the features of the formation of equilibrium clusters are studied and corresponding film thickness distributions are calculated. In the range of unstable states, the kinetics of the phase transition resulting in cluster formation is analyzed. In the early stage, regions shaped as holes with a film thickness close to the equilibrium one are formed. Hole coalescence leads to a film material redistribution followed by clustering. For this process, the kinetics of the average hole size and concentration is calculated. For formed clusters, the kinetics of the average radius, average height, concentration, and their radius and height distribution function are studied.

Keywords: wetting phase transitions, simulation, kinetics, thin films.

Received: 23.04.2019
Revised: 29.05.2019
Accepted: 29.05.2019

DOI: 10.21883/FTT.2019.10.48270.465


 English version:
Physics of the Solid State, 2019, 61:10, 1872–1881

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