Characterization of thin carbon films formed on the iron surface by magnetron sputtering with ion-beam mixing

The chemical composition, interatomic chemical bonds, and specific features of the atomic structure of nanosized carbon films on the surface of iron, which were prepared by magnetron sputtering before and after ion-beam mixing, have been investigated using X-ray photoelectron spectroscopy, X-ray diffraction analysis, extended electron energy loss fine structure spectroscopy, and Raman spectroscopy. It has been found that, in the ion-beam mixing region, there are structural inhomogeneities and nonstoichiometric iron carbides. The parameters of the local atomic structure of an ultrathin surface layer and the “carbon film–metal” transition region have been determined.