M. M. Dementyeva, K. E. Prikhod'ko, B. A. Gurovich, L. V. Kutuzov, D. A. Komarov, “Study of the evolution of the atomic composition of thin NbN films under irradiation with mixed ion beams by methods of electron energy loss spectroscopy”, Fizika Tverdogo Tela, 2016, Volume 58, Issue 11,Pages <nobr>2104

This article is cited in 4 papers

XX International Symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 14-18, 2016
Superconductivity

Study of the evolution of the atomic composition of thin NbN films under irradiation with mixed ion beams by methods of electron energy loss spectroscopy

M. M. Dementyeva^a, K. E. Prikhod'ko^ba, B. A. Gurovich^a, L. V. Kutuzov^a, D. A. Komarov^a

^a National Research Centre "Kurchatov Institute", Moscow
^b National Engineering Physics Institute "MEPhI", Moscow

Abstract: The variation in the atomic composition of ultrathin NbN films under irradiation by mixed ion beams to a doze of 4 dpa (for nitrogen) is experimentally studied by methods of electron energy loss spectroscopy with a transmission electron microscope in the transmission scan mode on cross-cut samples. The behavior of the substitution of nitrogen atoms by oxygen atoms has been established; it is characterized by changing the composition of the conducting part of the film from NbN to NbNO.