Abstract:
It is shown that (Ga,Mn)As layers formed by Mn$^+$ ion implantation into GaAs and subsequent annealing by an excimer laser pulse with an energy density to 200–300 mJ/cm$^2$ feature the properties of the $p$-type semiconductor and ferromagnetic properties. The threshold dose of implanted ions ($\sim$10$^{15}$ cm$^{-2}$) for activating Mn acceptors is determined. The sheet hole concentration and the Curie temperature increase with further increasing Mn$^+$ ion dose. Hysteresis loops in the magnetic field dependences of the Hall effect, the negative magnetoresistance, and magnetic and structural studies suggest that the layers are analogues of single-phase ferromagnetic compounds (Ga,Mn)As formed by low-temperature molecular beam epitaxy.