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JOURNALS // Meždunarodnyj naučno-issledovatel'skij žurnal // Archive

Meždunar. nauč.-issled. žurn., 2013 Issue 10(17), Pages 22–24 (Mi irj504)

PHYSICS AND MATHEMATICS

Optimal operation modes of dual magnetrons for deposition TiO$_2$ thin films

D. V. Sidelev, Y. N. Yurjev

National Research Tomsk Polytechnic University

Abstract: The investigation of optical properties of TiO$_2$ thin films, obtained by a dual magnetron sputtering system (MSS), shows that optical characteristics of films depend on their structure and determine by operation mode and configuration of the magnetic field of the magnetron.

Keywords: magnetron sputtering, dual magnetron, thin films.



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