Abstract:
The results of the research focused on the analysis of the effects of magnetic field on carbon plasma flow are presented. The flow of carbon cannon used in the facility UVNIPA-1-001 was investigated, and its structure was analysed by magnetic separation in order to optimize and enhance the quality of vacuum ion-plasma deposition method of film coating. Theoretical modelling of trajectories of particles' clusters with mass 1, 10 and 100 amu were made. As part of the experiment, the separation of a carbon beam on a copper substrate was carried out. The obtained results of mass-potential separation show that the plasma flow consists of two phases: ion and droplet. Each of these phases has a different deposition pattern on the copper substrate, which is due to deviation in the magnetic field.
Keywords:ion and droplet phases, deviation of particles in a magnetic field, carbon plasma beam.