Abstract:
Experimental results suggest that in the Ni/Ba$_{0.8}$Sr$_{0.2}$TiO$_3$/MgO structure with linear sizes of 150 $\times$ 150 mm can be realized by planar capacitor elements of variability over a range of capacity from 0.02 pF to 3.0 pF, which increased capacity is achieved by increasing the number of electrode sections.
Keywords:thin film ferroelectrics, planar capacitors of microscale size, microstrip lines, phase shifters, microwave devices.