A. A. Serdobintsev, S. B. Venig, V. A. Alexandrov, D. M. Mitin, A. G. Veselov, O. A. Kiryasova, V. I. Elmanov, “Formation of modified materials in flows of low-temperature plasma”, Izv. Sarat. Univ. Physics, 2013, Volume 13, Issue 2,Pages <nobr>47

Proceedings of International Scientific Seminar

Formation of modified materials in flows of low-temperature plasma

A. A. Serdobintsev^a, S. B. Venig^a, V. A. Alexandrov^b, D. M. Mitin^a, A. G. Veselov^b, O. A. Kiryasova^b, V. I. Elmanov^b

^a Saratov State University
^b Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences

Abstract: In this paper the results of experimental studies are presented. The experiments were aimed to synthesis of materials with modified properties. A special technique of synthesis in low-temperature plasma flows allows controlling film material parameters. The possibility to control optical, morphological and electrophysical properties is shown by the examples of ZnO and Si films.

Keywords: modified materials, low-temperature plasma, magnetron sputtering.

UDC: 621.793; 621.039.624

DOI: 10.18500/1817-3020-2013-13-2-47-50