Abstract:Background. The article presents a review of experimental and theoretical studies on the scattering of positive ions of small and medium energies by a metal. The relevance of such studies is due to the introduction in practice of new progressive beam technologies and methods for analyzing matter associated with the interaction of charged atomic particles with a solid. The purpose of this paper is to analyze the results of studies that establish the mechanism of interaction of ions with the surface when they are scattered on solid-state atoms, and also to study various factors (ion energy and mass, the target atom mass and its physical properties) that affect these mechanisms. Materials and methods. Experimental results were obtained on backscattering facilities having a high angular and energy resolution and making it possible to remove the energy spectra of scattered ions. Theoretical studies were carried out by computer simulation (numerical experiment) using computer technology within the framework of the chosen mathematical model. Conclusions. Depending on the energy and mass of the bombarding ions and target atoms, two interaction mechanisms are established: a model of paired elastic collisions (the region of kiloelectron-voltaic energies) and the mechanism of multiparticle interaction (low-energy region - tens and hundreds electron-volts). The limits of applicability of these mechanisms are determined and the ways of their possible use for analytical purposes are outlined.