Methods to reduce the scan time of the scanning probe microscope without deterioration of image quality

The control system of scanning probe microscope is an automatic control system with feedback. To increase the speed of such control systems we may, firstly, use the notch filter tuned to the resonance frequency of Z-scanner, and, secondly, by using fast scanning techniques. The paper presents measurements of grating gauge height of 25 nm using fast scanning techniques. It is shown that the developed scanning techniques provide more than double increase in scan rate with the same image quality.