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JOURNALS // Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki // Archive

Pis'ma v Zh. Èksper. Teoret. Fiz., 2014 Volume 99, Issue 9, Pages 614–617 (Mi jetpl3731)

This article is cited in 10 papers

CONDENSED MATTER

Fabrication of submicron structures by three-dimensional laser lithography

I. I. Shishkinab, M. V. Rybinab, K. B. Samusevab, M. F. Limonovba, R. V. Kiyanc, B. N. Chichkovc, Yu. S. Kivsharad, P. A. Belova

a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
b Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg
c Laser Zentrum Hannover
d Nonlinear Physics Centre, Research School of Physical Sciences and Engineering, Australian National University, Canberra

Abstract: As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

Received: 01.04.2014

DOI: 10.7868/S0370274X14090094


 English version:
Journal of Experimental and Theoretical Physics Letters, 2014, 99:9, 531–534

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