Phase composition of Ti-C Films obtained under the technological conditions of diamond formation at a carbon content of above $50$ at. $\%$

The phase composition of Ti-C films (with the carbon content varying from $50$ to $100$ at. $\%$) is studied by electron diffraction. The films are obtained by C and Ti ion sputtering followed by vapor deposition in the regime of the lowest possible supersaturation. It is found that the condensation in a certain proportion of components leads to the formation of a TiC$_2$ compound, which has the bcc lattice with a period of $0.294$ nm. When the carbon content is increased above $64$ at. $\%$, a transition to the diamond phase is observed.