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JOURNALS // Pis'ma v Zhurnal Èksperimental'noi i Teoreticheskoi Fiziki // Archive

Pis'ma v Zh. Èksper. Teoret. Fiz., 2019 Volume 109, Issue 5, Pages 294–300 (Mi jetpl5836)

This article is cited in 5 papers

OPTICS AND NUCLEAR PHYSICS

Physicochemical mechanisms of nanostructuring of glass by femtosecond laser pulses with the use of selective etching

A. M. Shakhov, A. A. Astafiev, V. A. Nadtochenko

Semenov Institute of Chemical Physics, Russian Academy of Sciences, Moscow, Russia

Abstract: Processes occurring at nanostructuring of glass irradiated by tightly focused single femtosecond laser pulses with selective chemical etching in the alkaline solution have been studied. Structures with a width up to 50 nm have been created. The dependence of the morphology and sizes of the created structures on the parameters of laser radiation and etching time has been revealed. Measurements of fluorescence of glass at the variation of the polarization and energy of a laser pulse in wide ranges have revealed the character of nonlinear absorption processes in a sample. The results have clarified the physicochemical processes in glass leading to selective chemical etching and demonstrate advantages of this method over the method of simple laser processing of glass for the creation of complex structures with subdiffraction resolution.

Received: 16.11.2018
Revised: 23.11.2018
Accepted: 26.12.2018

DOI: 10.1134/S0370274X19050035


 English version:
Journal of Experimental and Theoretical Physics Letters, 2019, 109:5, 292–297

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