Influence of crystallization on the 3D structure of pores in ferroelectric PZT films

The structure of porous lead titanate-zirconate films, obtained by chemical deposition from solutions containing Brij 76, has been visualized for the first time using focused ion beam scanning electron microscopy nanotomography. Several techniques for determining the connectivity of pores and their distribution are presented. It is shown that the films have a highly connected system of pores regularly distributed in sublayers; this system is formed during multilayer deposition and subsequent crystallization.