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JOURNALS // Journal of Siberian Federal University. Mathematics & Physics // Archive

J. Sib. Fed. Univ. Math. Phys., 2010 Volume 3, Issue 1, Pages 118–124 (Mi jsfu110)

Ellipsometer Mounting System Design Using CAD

Alexander V. Efremov, Sergey G. Ovchinnikov, Sergey N. Varnakov, Nikolay N. Kosyrev

Kirensky Institute of Physics, SB RAS, Krasnoyarsk, Russia

Abstract: Ellipsometer arms mounting is a part of MBE system with magneto-optic ellipsometric complex, for which the automated designing task has been examined. The ability of the limiting conditions driven design has been shown. Using CAD and mathematical modeling the optimal form of ellipsometer mounting arms was found. The acceleration that appears under typical mechanical overloads has been defined, under the condition that the maximum beam deviation of the analyzer did not exceed the admissible deviation for carrying out measurements.

Keywords: CAD, mathematical modeling, ellipsometer, overload modeling, finite element method.

UDC: 53.084

Received: 18.12.2009
Received in revised form: 25.01.2010
Accepted: 20.02.2010



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