Abstract:
Ellipsometer arms mounting is a part of MBE system with magneto-optic ellipsometric complex, for which the automated designing task has been examined. The ability of the limiting conditions driven design has been shown. Using CAD and mathematical modeling the optimal form of ellipsometer mounting arms was found. The acceleration that appears under typical mechanical overloads has been defined, under the condition that the maximum beam deviation of the analyzer did not exceed the admissible deviation for carrying out measurements.
Keywords:CAD, mathematical modeling, ellipsometer, overload modeling, finite element method.
UDC:
53.084
Received: 18.12.2009 Received in revised form: 25.01.2010 Accepted: 20.02.2010